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Update to Avantor’s response to the coronavirus (COVID-19) pandemic

HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade

Supplier: AHSI SPA
Danger

100-HMDS100-GAL 100-HMDS100-QT
76540-986CS 1403.86 USD InStock
76540-986 76541-038
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade
HMDS (1,1,1,3,3,3-hexamethyldisilazane)
Transene Hexamethyldisilzane LM (HMDS) is an ultra-high purity, "low metals" adhesion promoter for photoresists and other photolithography applications.


Formula: (CH₃)₃SiNHSi(CH₃)₃
MW: 161.39 g/mol
Boiling Pt: 126
Melting Pt: -82
Density: 0.77 g/cc
Flash Pt: 12.7 °C (closed cup)
Storage Temperature: Ambient
 MDL Number: MFCD00008259
CAS Number: 999-97-3
UN: 2924
ADR: 3.8 II
Merck Index: 13,04708
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Specification Test Results
Assay (HMDS) 99.92 min %
Water (H2O) 50 ppm max.
Color 10 APHA max.
Chloride (Cl) 2 ppm max.
Trailing Impurity 0.024 % max.
UV abs at 270 nm 0.039-0.115
Aluminum (Al) 0.8 ppb max.
Arsenic and Antimony (as As) 0.4 ppb max.
Barium (Ba) 0.03 ppb max.
Beryllium (Be) 0.16 ppb max.
Bismuth (Bi) 0.02 ppb max.
Boron (B) 3 ppb max.
Cadmium (Cd) 0.2 ppb max.
Calcium (Ca) 2.2 ppb max.
Chromium (Cr) 1 ppb max.
Cobalt (Co) 0.1 ppb max.
Copper (Cu) 0.5 ppb max.
Gallium (Ga) 0.1 ppb max.
Germanium (Ge) 0.12 ppb max.
Gold (Au) 0.08 ppb max.
Iron (Fe) 0.2 ppb max.
Lead (Pb) 0.2 ppb max.
Lithium (Li) 0.1 ppb max.
Magnesium (Mg) 0.3 ppb max.
Manganese (Mn) 0.2 ppb max.
Molybdenum (Mo) 0.3 ppb max.
Nickel (Ni) 0.4 ppb max.
Potassium (K) 0.4 ppb max.
Silver (Ag) 0.1 ppb max.
Sodium (Na) 0.88 ppb max.
Strontium (Sr) 0.1 ppb max.
Tantalum (Ta) 0.12 ppb max.
Thallium (Tl) 2 ppb max.
Tin (Sn) 0.2 ppb max.
Titanium (Ti) 2 ppb max.
Vanadium (V) 0.4 ppb max.
Zinc (Zn) 0.7 ppb max.
Zirconium (Zr) 0.2 ppb max.
Particle Count, 1.0 mm 10 ct/ml max.
Particle Count, 0.5 mm 20 ct/ml max.
Particle Count, 0.3 mm 50 ct/ml max.
Particle Count, 0.2 mm 90 ct/ml max.

 

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